Lithographic apparatus

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August undefined, 2024

WebNational Center for Biotechnology Information. 8600 Rockville Pike, Bethesda, MD, 20894 USA. Contact. Policies. FOIA. HHS Vulnerability Disclosure. National Library of … WebA chamber for a projection system of a lithographic apparatus is described, the chamber comprising:- an opening configured to enable, during use, a patterned radiation beam to be projected onto a substrate that is arranged outside the chamber;- a conduit having an …

Lithographic projection apparatus专利检索-·渗析专利检索查询-专 …

WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously … WebA lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to … css check lan

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WebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called … Web9 jul. 2009 · Abstract. A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes … css check if has child

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Lithographic apparatus and device manufacturing method

Web1 mei 2008 · Lithographic apparatus include steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one pass, and … Web1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam … css check if input is emptyWeb1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam path in the space, the apparatus comprising: a liquid confinement structure configured to at least partly confine the liquid in the space, the liquid confinement structure having, a liquid … css check if button is disabled

"WebA lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate held on a substrate table, the … " - Lithographic apparatus

Lithographic apparatus

Web6 apr. 2001 · On-the-Fly leveling in a lithographic apparatus is conducted using a setpoint derived by filtering the output of the combination of the output of a level sensor and … WebA lithographic apparatus include an optical element that includes an oriented carbon nanotube sheet. The optical element has an element …

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WebTo provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on … Web588740692 - EP 4162324 A1 20240412 - SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A …

WebA lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within a range of 4 nm to 20 nm, for example 6.7 nm or 13.5 nm, may be … WebThe lithographic apparatus further comprises a lens for projecting radiation beam at the patterning device with a magnification of between 0.5× and 2×, a substrate table …

Web7656502 - 11472566 - USPTO . Application Jun 22, 2006 - Publication Feb 02, 2010 Harmen Klaus Van Der Schoot Noud Jan Gilissen Peter Paul Steijaert Erik Roelof … WebThe lithographic apparatus according to claim 4, wherein the first seal, the second seal and/or third seal comprises any one or combinations of acrylic rubber, butadiene rubber, …

WebA lithographic apparatus is a machine that applies a desired pattern onto a target portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of …

WebPURPOSE: A lithographic apparatus is provided to decrease the sensitivity to the effects of collision in a horizontal plane and to reduce the damage caused by such a collision. … css check if parent has classWebKnown lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion at one time, and so-called … css check if width is greater than heightWeb23 mei 2005 · Abstract: A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first … css check if element is overflowingWebA lithographic projection apparatus comprising: a support structure configured to hold a patterning device and movable in a scanning direction, the patterning device configured … css checkmark listWeb31 jan. 2024 · Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the … ear erasers reviewWebThe lithographic apparatus includes a projection system configured to project a patterned radiation beam to form an exposure area of a substrate held on a substrate table. The … css check mobileWebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … css check safari